@misc{indiciae59a86b320a10,
  title = {Wafer bonded virtual substrate and method for forming the same},
  author = {Atwater, Jr., Harry A. and Zahler, James M. and Morral, Anna Fontcuberta i},
  year = {2007},
  url = {https://ntrs.nasa.gov/citations/20080009474},
  note = {Source identifier: 20080009474}
}