TY  - RPRT
TI  - Wafer bonded virtual substrate and method for forming the same
AU  - Atwater, Jr., Harry A.
AU  - Zahler, James M.
AU  - Morral, Anna Fontcuberta i
PY  - 2007
UR  - https://ntrs.nasa.gov/citations/20080009474
ID  - 20080009474
ER  -