@misc{indiciae689155653022,
  title = {Multiple internal seal ring micro-electro-mechanical system vacuum packaging method},
  author = {Hayworth, Ken J. and Yee, Karl Y. and Shcheglov, Kirill V. and Bae, Youngsam and Wiberg, Dean V. and Challoner, A. Dorian and Peay, Chris S.},
  year = {2008},
  url = {https://ntrs.nasa.gov/citations/20090002641},
  note = {Source identifier: 20090002641}
}