TY  - RPRT
TI  - Multiple internal seal ring micro-electro-mechanical system vacuum packaging method
AU  - Hayworth, Ken J.
AU  - Yee, Karl Y.
AU  - Shcheglov, Kirill V.
AU  - Bae, Youngsam
AU  - Wiberg, Dean V.
AU  - Challoner, A. Dorian
AU  - Peay, Chris S.
PY  - 2008
UR  - https://ntrs.nasa.gov/citations/20090002641
ID  - 20090002641
ER  -