TY  - RPRT
TI  - Tuning of MEMS Devices using Evolutionary Computation and Open-loop Frequency Response
AU  - Keymeulen, Didier
AU  - Fink, Wolfgang
AU  - Ferguson, Michael I.
AU  - Peay, Chris
AU  - Oks, Boris
AU  - Terrile, Richard
AU  - Yee, Karl
PY  - 2005
UR  - https://ntrs.nasa.gov/citations/20090007560
ID  - 20090007560
ER  -