TY  - RPRT
TI  - Evolving MEMS Resonator Designs for Fabrication
AU  - Hornby, Gregory S.
AU  - Kraus, William F.
AU  - Lohn, Jason D.
PY  - 2008
UR  - https://ntrs.nasa.gov/citations/20090029402
ID  - 20090029402
ER  -