@misc{indiciae5df203a339fa,
  title = {Fabricating Blazed Diffraction Gratings by X-Ray Lithography},
  author = {Mouroulis, Pantazis and Hartley, Frank and Wilson, Daniel},
  year = {2004},
  url = {https://ntrs.nasa.gov/citations/20110016577},
  note = {Source identifier: 20110016577}
}