@misc{indiciae13705b7d6af5,
  title = {Artifacts for Calibration of Submicron Width Measurements},
  author = {Grunthaner, Frank and Grunthaner, Paula and Bryson, Charles, III},
  year = {2003},
  url = {https://ntrs.nasa.gov/citations/20110023607},
  note = {Source identifier: 20110023607}
}