TY  - RPRT
TI  - Artifacts for Calibration of Submicron Width Measurements
AU  - Grunthaner, Frank
AU  - Grunthaner, Paula
AU  - Bryson, Charles, III
PY  - 2003
UR  - https://ntrs.nasa.gov/citations/20110023607
ID  - 20110023607
ER  -