@misc{indiciaeb95a182d657c,
  title = {A Reactive-Ion Etch for Patterning Piezoelectric Thin Film},
  author = {Yang, Eui-Hyeok and Wild, Larry},
  year = {2003},
  url = {https://ntrs.nasa.gov/citations/20110024080},
  note = {Source identifier: 20110024080}
}