@misc{indiciaeb74dda8b0fc1,
  title = {Process for Smoothing an Si Substrate after Etching of SiO2},
  author = {Turner, Tasha and Wu, Chi},
  year = {2003},
  url = {https://ntrs.nasa.gov/citations/20110024159},
  note = {Source identifier: 20110024159}
}