@misc{indiciae618c1792b09d,
  title = {MEMS-Based Piezoelectric/Electrostatic Inchworm Actuator},
  author = {Yang, Eui-Hyeok},
  year = {2003},
  url = {https://ntrs.nasa.gov/citations/20110024168},
  note = {Source identifier: 20110024168}
}