@misc{indiciae29cf8bd085ec, title = {Fully Integrated, Miniature, High-Frequency Flow Probe Utilizing MEMS Leadless SOI Technology}, author = {Ned, Alex and Kurtz, Anthony and Shang, Tonghuo and Goodman, Scott and Giemette. Gera;d}, year = {2013}, url = {https://ntrs.nasa.gov/citations/20130012681}, note = {Source identifier: 20130012681} }