TY  - RPRT
TI  - Fully Integrated, Miniature, High-Frequency Flow Probe Utilizing MEMS Leadless SOI Technology
AU  - Ned, Alex
AU  - Kurtz, Anthony
AU  - Shang, Tonghuo
AU  - Goodman, Scott
AU  - Giemette. Gera;d
PY  - 2013
UR  - https://ntrs.nasa.gov/citations/20130012681
ID  - 20130012681
ER  -