@misc{indiciae3b3e5c9f3b60,
  title = {Development of Cryogenic Detector Arrays Using ALD},
  author = {LeDuc, Rick and Greer, Frank and Day, Peter},
  year = {2012},
  url = {https://ntrs.nasa.gov/citations/20140002648},
  note = {Source identifier: 20140002648}
}