@misc{indiciaea171db252664, title = {Carbon-Based Nano-Electro-Mechanical-Systems}, author = {Kaul, A. B. and Khan, A. R. and Megerian, K. G. and Epp, L. and LeDuc, G. and Bagge, L. and Jennings, A. T. and Jang, D. and Greer, J. R.}, year = {2011}, url = {https://ntrs.nasa.gov/citations/20150006075}, note = {Source identifier: 20150006075} }