@misc{indiciaee908911df9d8, title = {Fabrication of Electrostatically Actuated Microshutters Arrays}, author = {Oh, L. and Li, M. and Kelly, D. and Kutyrev, A. and Moseley, S.}, year = {2016}, url = {https://ntrs.nasa.gov/citations/20160006596}, note = {Source identifier: 20160006596} }