TY  - RPRT
TI  - Fabrication of Electrostatically Actuated Microshutters Arrays
AU  - Oh, L.
AU  - Li, M.
AU  - Kelly, D.
AU  - Kutyrev, A.
AU  - Moseley, S.
PY  - 2016
UR  - https://ntrs.nasa.gov/citations/20160006596
ID  - 20160006596
ER  -