@misc{indiciaed5206e66c671,
  title = {Multi-Step Deep Reactive Ion Etching Fabrication Process for Silicon-Based Terahertz Components},
  author = {Jung-Kubiak, Cecile and Reck, Theodore and Chattopadhyay, Goutam and Perez, Jose Vicente Siles and Lin, Robert H. and Mehdi, Imran and Lee, Choonsup and Cooper, Ken B. and Peralta, Alejandro},
  year = {2016},
  url = {https://ntrs.nasa.gov/citations/20160013189},
  note = {Source identifier: 20160013189}
}