@misc{indiciae188fd5af8f57,
  title = {Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers},
  author = {Duff, S. M. and Austermann, J. and Beall, J. A. and Becker, D. and Datta, R. and Gallardo, P. A. and Henderson, S. W. and Hilton, G. C. and Ho, S. P. and Hubmayr, J. and Koopman, B. J. and Li, D. and McMahon, J. and Nati, F. and Niemack, M. D. and Pappas, C. G. and Salatino, M. and Schmitt, B. L. and Simon, S. M. and Staggs, S. T. and Stevens, J. R. and Van Lanen, J. and Vavagiakis, E. M. and Ward, J. T. and Wollack, E. J.},
  year = {2016},
  url = {https://ntrs.nasa.gov/citations/20160013324},
  note = {Source identifier: 20160013324}
}