@misc{indiciaef29f450e5f33, title = {E-Beam Generated Plasma Etching for Developing High-Reflectance Mirrors for Far-Ultraviolet Astronomical Instrument Applications}, author = {Quijada, Manuel A. and Boris, David R. and del Hoyo, Javier and Wollack, Edward J. and Kozen, Alexander C. and Dwivedi, Vivek}, year = {2018}, url = {https://ntrs.nasa.gov/citations/20180005725}, note = {Source identifier: 20180005725} }