TY  - RPRT
TI  - E-Beam Generated Plasma Etching for Developing High-Reflectance Mirrors for Far-Ultraviolet Astronomical Instrument Applications
AU  - Quijada, Manuel A.
AU  - Boris, David R.
AU  - del Hoyo, Javier
AU  - Wollack, Edward J.
AU  - Kozen, Alexander C.
AU  - Dwivedi, Vivek
PY  - 2018
UR  - https://ntrs.nasa.gov/citations/20180005725
ID  - 20180005725
ER  -