@misc{indiciae32cb273328ee,
  title = {MSTAR: an absolute metrology system with submicrometer accuracy},
  author = {Fetterman, Harrold R. and Ahn, Seh-Won and Steier, William H. and Burger, Johan and Peters, Robert D. and Dubovitsky, Serge and Lay, Oliver P.},
  year = {2004},
  url = {https://ntrs.nasa.gov/citations/20210001722},
  note = {Source identifier: 20210001722}
}