TY  - RPRT
TI  - MEMS Micro Valve for Space Applications
AU  - Tang, T.
AU  - Bame, D.
AU  - Tang, W.
AU  - Chakraborty,I.
PY  - 1999
UR  - https://ntrs.nasa.gov/citations/20210003703
ID  - 20210003703
ER  -