@misc{indiciae8138db6209b9,
  title = {Tunneling Tip Protection for a Bulk Micromachined Accelerometer},
  author = {Hartley, F.T. and Wang, J. and McClelland, B. and Zavracky, P.M.},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/20210004027},
  note = {Source identifier: 20210004027}
}