TY  - RPRT
TI  - Tunneling Tip Protection for a Bulk Micromachined Accelerometer
AU  - Hartley, F.T.
AU  - Wang, J.
AU  - McClelland, B.
AU  - Zavracky, P.M.
PY  - 1995
UR  - https://ntrs.nasa.gov/citations/20210004027
ID  - 20210004027
ER  -