@misc{indiciae56c8c4e8cd2c,
  title = {Boron diffusion in silicon devices},
  author = {Rohatgi, Ajeet and Kim, Dong Seop and Nakayashiki, Kenta and Rounsaville, Brian},
  year = {2010},
  url = {https://www.osti.gov/biblio/1014672},
  note = {Source identifier: 1014672}
}