@misc{indiciae1ab958c0afd0,
  title = {Multiphysics modeling and simulation for MEMS development.},
  author = {Sumali, Anton Hartono and Wong, Chung-Nin Channy},
  year = {2010},
  url = {https://www.osti.gov/biblio/1030381},
  note = {Source identifier: 1030381}
}