@misc{indiciae615ed7990dff,
  title = {Three wafer stacking for 3D integration.},
  author = {Greth, K Douglas and Ford, Christine L and Lantz, Jeffrey W and Shinde, Subhash L and Timon, Robert P and Bauer, Todd M and Hetherington, Dale Laird and Sanchez, Carlos Anthony},
  year = {2011},
  doi = {10.2172/1031299},
  url = {https://www.osti.gov/biblio/1031299},
  note = {Source identifier: 1031299}
}