@misc{indiciae2c9c74c194db,
  title = {Nanostructure templating using low temperature atomic layer deposition},
  author = {Grubbs, Robert K and Bogart, Gregory R and Rogers, John A},
  year = {2011},
  url = {https://www.osti.gov/biblio/1034170},
  note = {Source identifier: 1034170}
}