@misc{indiciaeb1729ba2d929,
  title = {Characterization of electron microscopes with binary pseudo-random multilayer test samples},
  author = {Yashchuk, V V and Conley, R and Anderson, E H and Barber, S K and Bouet, N and McKinney, W R},
  year = {2010},
  url = {https://www.osti.gov/biblio/1040531},
  note = {Source identifier: 1040531}
}