TY  - RPRT
TI  - Characterization of electron microscopes with binary pseudo-random multilayer test samples
AU  - Yashchuk, V V
AU  - Conley, R
AU  - Anderson, E H
AU  - Barber, S K
AU  - Bouet, N
AU  - McKinney, W R
PY  - 2010
UR  - https://www.osti.gov/biblio/1040531
ID  - 1040531
ER  -