@misc{indiciaed6689810266e,
  title = {Characterization of Electron Microscopes with Binary Pseudo-random Multilayer Test Samples},
  author = {Yashchuk, V and Conley, R and Anderson, E and Barber, S and Bouet, N and McKinney, W and Takacs, P and Voronov, D},
  year = {2011},
  doi = {10.1016/j.nima.2010.11.124},
  url = {https://www.osti.gov/biblio/1041757},
  note = {Source identifier: 1041757}
}