@misc{indiciae77e88f0b4f57,
  title = {Hard X-ray Nano Patterning using a Sectioned Multilayer},
  author = {Lee, S and Cho, I and Kim, J and Yan, H and Conley, R and Liu, C and Macrander, A and Maser, J and Stephenson, G},
  year = {2011},
  doi = {10.1063/1.3552589},
  url = {https://www.osti.gov/biblio/1041861},
  note = {Source identifier: 1041861}
}