@misc{indiciae26b5d972108f,
  title = {White light interferometry for quantitative surface characterization in ion sputtering experiments.},
  author = {Baryshev, S V and Zinovev, A V and Tripa, C E and Erck, R A and Veryovkin, I V},
  year = {2012},
  doi = {10.1016/j.apsusc.2012.03.144},
  url = {https://www.osti.gov/biblio/1050174},
  note = {Source identifier: 1050174}
}