TY  - RPRT
TI  - White light interferometry for quantitative surface characterization in ion sputtering experiments.
AU  - Baryshev, S V
AU  - Zinovev, A V
AU  - Tripa, C E
AU  - Erck, R A
AU  - Veryovkin, I V
PY  - 2012
DO  - 10.1016/j.apsusc.2012.03.144
UR  - https://www.osti.gov/biblio/1050174
ID  - 1050174
ER  -