@misc{indiciae98ce45ec665d,
  title = {Method to planarize three-dimensional structures to enable conformal electrodes},
  author = {Nikolic, Rebecca J and Conway, Adam M and Graff, Robert T and Reinhardt, Catherine and Voss, Lars F and Shao, Qinghui},
  year = {2012},
  url = {https://www.osti.gov/biblio/1080310},
  note = {Source identifier: 1080310}
}