TY  - RPRT
TI  - Method to planarize three-dimensional structures to enable conformal electrodes
AU  - Nikolic, Rebecca J
AU  - Conway, Adam M
AU  - Graff, Robert T
AU  - Reinhardt, Catherine
AU  - Voss, Lars F
AU  - Shao, Qinghui
PY  - 2012
UR  - https://www.osti.gov/biblio/1080310
ID  - 1080310
ER  -