@misc{indiciae83325ca2c1b5, title = {Lithographically defined microporous carbon structures}, author = {Burckel, David Bruce and Washburn, Cody M. and Polsky, Ronen and Brozik, Susan M. and Wheeler, David R.}, year = {2013}, url = {https://www.osti.gov/biblio/1082898}, note = {Source identifier: 1082898} }