@misc{indiciae3bae3cbfff0f,
  title = {Method for fabricating a microelectromechanical resonator},
  author = {Wojciechowski, Kenneth E and Olsson, III, Roy H},
  year = {2013},
  url = {https://www.osti.gov/biblio/1083225},
  note = {Source identifier: 1083225}
}