@misc{indiciae7ff3a84bd82e,
  title = {A newphase-shift microscope designed for high accuracy stitching interferometry},
  author = {Thomasset, M. and Idir, M. and Polack, F. and Bray, M. and Servant, J.},
  year = {2012},
  url = {https://www.osti.gov/biblio/1091762},
  note = {Source identifier: 1091762}
}