TY  - RPRT
TI  - A newphase-shift microscope designed for high accuracy stitching interferometry
AU  - Thomasset, M.
AU  - Idir, M.
AU  - Polack, F.
AU  - Bray, M.
AU  - Servant, J.
PY  - 2012
UR  - https://www.osti.gov/biblio/1091762
ID  - 1091762
ER  -