@misc{indiciae6f54ff47b01b,
  title = {Lithographic dry development using optical absorption},
  author = {Olynick, Deirdre and Schuck, P. James and Schmidt, Martin},
  year = {2013},
  url = {https://www.osti.gov/biblio/1092754},
  note = {Source identifier: 1092754}
}