@misc{indiciaeba198c6d7f5f,
  title = {Carbon MEMS Accelerometer.},
  author = {Washburn, Cody M. and Wheeler, David Roger and Williams, Randy J. and McBrayer, John D. and Rohwer, Tedd A. and Hance, Bradley G. and Greth, Karl Douglas and Stinnett, Regan W and Strong, Jennifer and Finnegan, Patrick Sean},
  year = {2011},
  url = {https://www.osti.gov/biblio/1118641},
  note = {Source identifier: 1118641}
}