@misc{indiciae52c79101d2c3,
  title = {Double Sided Interferometer, Profiling Measurement Simultaneously Yields Thickness and Form},
  author = {Seugling, R M and Wilson, M J and Davis, P J and Peterson, S C and Hamilton, J},
  year = {2010},
  url = {https://www.osti.gov/biblio/1119950},
  note = {Source identifier: 1119950}
}