@misc{indiciae1779162063fe,
  title = {Off-Normal Patterned Etching Through Suspended Membranes.},
  author = {Burckel, David Bruce and Resnick, Paul James and Henry, Michael David and Finnegan, Patrick Sean},
  year = {2014},
  url = {https://www.osti.gov/biblio/1140777},
  note = {Source identifier: 1140777}
}