TY  - RPRT
TI  - Off-Normal Patterned Etching Through Suspended Membranes.
AU  - Burckel, David Bruce
AU  - Resnick, Paul James
AU  - Henry, Michael David
AU  - Finnegan, Patrick Sean
PY  - 2014
UR  - https://www.osti.gov/biblio/1140777
ID  - 1140777
ER  -