@misc{indiciae202e9e633617,
  title = {A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope},
  author = {Benk, Markus P. and Miyakawa, Ryan H. and Chao, Weilun and Wang, Yow-Gwo and Wojdyla, Antoine and Johnson, David G. and Donoghue, Alexander P. and Goldberg, Kenneth A.},
  year = {2014},
  doi = {10.1117/12.2065513},
  url = {https://www.osti.gov/biblio/1163231},
  note = {Source identifier: 1163231}
}