@misc{indiciaefe6c1e350413, title = {Processes for multi-layer devices utilizing layer transfer}, author = {Nielson, Gregory N and Sanchez, Carlos Anthony and Tauke-Pedretti, Anna and Kim, Bongsang and Cederberg, Jeffrey and Okandan, Murat and Cruz-Campa, Jose Luis and Resnick, Paul J}, year = {2015}, url = {https://www.osti.gov/biblio/1169088}, note = {Source identifier: 1169088} }