@misc{indiciae3fb1673379af,
  title = {Electrostatic MEMS devices with high reliability},
  author = {Goldsmith, Charles L and Auciello, Orlando H and Sumant, Anirudha V and Mancini, Derrick C and Gudeman, Chris and Sampath, Suresh and Carlilse, John A and Carpick, Robert W and Hwang, James},
  year = {2015},
  url = {https://www.osti.gov/biblio/1170735},
  note = {Source identifier: 1170735}
}